Laser-induced fluorescence measurements of absolute SiH densities in SiH4-H2 RF discharges and comparison with a numerical model

Plasma Sources Science and Technology

Volumn 7, Issue 2, 1998, Pages 130-135

  Hertl, Michael ^a   Dorval, Nelly ^a   Leroy, Olivier ^a   Jolly, Jacques ^a   Péalat, Michel ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; FLUORESCENCE; GLOW DISCHARGES; LASER APPLICATIONS; MATHEMATICAL MODELS; RAYLEIGH SCATTERING; SILANES; THIN FILMS;

LASER INDUCED FLUORESCENCE SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TWO DIMENSIONAL;

PLASMA DENSITY;

EID: 0032071997     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/2/006     Document Type: Review

References (20)

1. Kushner M J 1992 J. Appl. Phys. 71 4173-89
2. Djelloul A, Despax B, Couderc J P and Duverneuil P 1995 J. Physique Coll. II 5 C5 307-14
3. Kae-Nune P, Perrin J, Guillon J and Jolly J 1994 Japan. J. Appl. Phys. 33 4303-7
4. Kae-Nune P, Perrin J, Guillon J and Jolly J 1995 Plasma Sources Sci. Technol. 4 250-9
5. Kae-Nune P, Perrin J, Jolly J and Guillon J 1996 Surf. Sci. 360 L495-8
6. Leroy O, Perrin J, Jolly J, Péalat M and Levebvre M 1997 J. Phys. D: Appl. Phys. 30 1-11
7. Leroy O, Gousset G, Alvès L, Perrin J and Jolly J Plasma Sources Sci. Technol, submitted
8. Schmitt J P M, Gressier P, Krishnan M, de Rosny G and Perrin J 1984 Chem. Phys. 84 281-93
9. Matsumi Y, Hayashi T, Yoshikawa H and Komiya S 1986 J. Vac. Sci. Technol. A 4 1786-90
10. Tachibana K, Mukai T and Harima H 1991 Japan. J. Appl. Phys. 30 1208-11
11. Engelhard M, Jacob W, Möller W and Koch AW 1995 Appl. Opt. 34 4542-51
12. Doerk T, Hertl M, Pfelzer B, Hädrich S, Jauernik P and Uhlenbusch J 1997 Appl. Phys. B 64 111-8
13. Godyak V A and Piejak RB 1990 J. Vac. Sci. Technol A 8 3833
14. Cunge G, Booth J P and Derouard J 1996 Chem. Phys. Lett. 263 645-50
15. Ducloy M 1973 Phys. Rev. A 8 1844-59
16. Daily J W 1977 Appl. Opt. 16 2322-7
17. Bauer W, Becker K H, Düren R, Hubrich C and Meuser R 1984 Chem. Phys. Lett. 108 560-1
18. Klynning L, Lindgren B and Sassenberg U 1979 Phys. Scr. 20 617
19. Singh P D and Vanlandingham F G 1978 Astron. Astrophys. 66 87
20. Kovacs I 1969 Rotational Structure in the Spectra of Diatomic Molecules (London: Hilger)