MICROELECTROMECHANICAL SYSTEMS: Interfacing Electronics to a Non-Electronic World

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1996, Pages 11-18

  Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; SEMICONDUCTOR DEVICES; ACTUATORS; COST EFFECTIVENESS; ELECTRONICS INDUSTRY; INDUSTRIAL APPLICATIONS; MICROCOMPUTERS; RELIABILITY; SENSORS; STRUCTURE (COMPOSITION); TECHNOLOGY;

DIGITAL COMPENSATION; ELECTRONIC WORLD; EMBEDDED MICROPROCESSORS; INTEGRATED SENSORS; LOW-COSTS; LOW-POWER ELECTRONICS; PRINT HEAD; PROJECTION DISPLAYS; SELF-TESTING; SENSOR POWER;

VIRTUAL STORAGE; MICROELECTROMECHANICAL DEVICES;

EMBEDDED MICROPROCESSORS; LOW POWER ELECTRONICS; MICROINSTRUMENTATION SYSTEMS; SELF TESTING;

EID: 0030407078     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1996.553029     Document Type: Conference Paper

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