GaAs MEMS design using 0.2 μm HEMT MMIC technology

IEEE-CAS Region 8 Workshop on Analog and Mixed IC Design, Proceedings

Volumn , Issue , 1997, Pages 127-130

  Ribas, R P ^a   Bennouri, N ^a   Karam, J M ^a   Courtois, B ^a  

^a TIMA LABORATORY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; ETCHING; HIGH ELECTRON MOBILITY TRANSISTORS; INTEGRATED CIRCUIT LAYOUT; MICROMACHINING; MICROSTRIP LINES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; THERMOPILES;

WET CHEMICAL ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 0031334050     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)