메뉴 건너뛰기




Volumn 45, Issue 4, 1998, Pages 1105-1112

Characterization of dielectric and electro-optic properties of PLZT 9/65/35 films on sapphire for electro-optic applications

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC LOSSES; ELECTROOPTICAL EFFECTS; LEAD COMPOUNDS; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL FILMS; PERMITTIVITY; PEROVSKITE; RAPID THERMAL ANNEALING; SAPPHIRE; SPUTTER DEPOSITION; THERMAL EFFECTS;

EID: 0032118214     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.710594     Document Type: Article
Times cited : (17)

References (22)
  • 2
    • 84987277478 scopus 로고    scopus 로고
    • Hot-pressed (Pb,La)(Zr,Ti)03 ferroelectric ceramics for electrooptic applications
    • vol. 54, pp. 1-11. 1971.
    • G. H. Haertling arid C. E. Land, Hot-pressed (Pb,La)(Zr,Ti)03 ferroelectric ceramics for electrooptic applications, J. Amer. Ceram. Soc., vol. 54, pp. 1-11. 1971.
    • J. Amer. Ceram. Soc.
    • Haertling Arid, G.H.1    Land, C.E.2
  • 4
    • 0017469085 scopus 로고    scopus 로고
    • Preparation and properties of ferroelectric PLZT thin films by rf spuUeriug
    • vol. 48, pp. 951-953, 1977.
    • M. Ishida, II. Matsunami, and T. Tanaka, Preparation and properties of ferroelectric PLZT thin films by rf spuUeriug, J. Appl. Phys., vol. 48, pp. 951-953, 1977.
    • J. Appl. Phys.
    • Ishida, M.1    Matsunami, I.I.2    Tanaka, T.3
  • 5
    • 0026227451 scopus 로고    scopus 로고
    • Preparation of ferroelectric (Pb, La)(Zr,Ti)Os thin films by sol-gel process and dielectric properties,'
    • vol. 30, pp. 2178-2181, 1991.
    • T. Kawano, T. Sci, and T. Tsuchiya, Preparation of ferroelectric (Pb, La)(Zr,Ti)Os thin films by sol-gel process and dielectric properties,' Jpn. J. Appl. Phys., vol. 30, pp. 2178-2181, 1991.
    • Jpn. J. Appl. Phys.
    • Kawano, T.1    Sci, T.2    Tsuchiya, T.3
  • 6
    • 0000524212 scopus 로고    scopus 로고
    • Basic thin film process for perovskite ferroelectric materials
    • vol. 200, pp. 103-115, 1990.
    • H. Adachi and K. Wasa, Basic thin film process for perovskite ferroelectric materials, Mater. Res. Soc. Symp. Proc., vol. 200, pp. 103-115, 1990.
    • Mater. Res. Soc. Symp. Proc.
    • Adachi, H.1    Wasa, K.2
  • 7
    • 0027678377 scopus 로고    scopus 로고
    • Dielectric and electrooptic properties of acetate derived PLZT X/65/35 thin films
    • vol. 3, pp. 207-215, 1993.
    • G. H. Haertling, Dielectric and electrooptic properties of acetate derived PLZT X/65/35 thin films, Integr. Ferroelect., vol. 3, pp. 207-215, 1993.
    • Integr. Ferroelect.
    • Haertling, G.H.1
  • 8
    • 0030217106 scopus 로고    scopus 로고
    • Formation and characteristics of lead lanthanum zirconium titanate thin films formed by using the rf sputtering method
    • vol. 7, pp. 309-313. 1996.
    • Y. S. Hwang, S. H. Paek, J. H. Lee, C. S. Park, J. S. Choi, J. K. Jung, and \. N. Kirn, Formation and characteristics of lead lanthanum zirconium titanate thin films formed by using the rf sputtering method. J. Mater. Scz.: Mater. Electron., vol. 7, pp. 309-313. 1996.
    • J. Mater. Scz.: Mater. Electron.
    • Hwang, Y.S.1    Paek, S.H.2    Lee, J.H.3    Park, C.S.4    Choi, J.S.5    Jung, J.K.6    Kirn, N.7
  • 9
    • 0001457471 scopus 로고    scopus 로고
    • Rapid thermal annealing of sol-gel derived lead zirconate titanate thin films
    • vol. 71, pp. 4465-4469, 1992.
    • J. Chen, K. R. Udayakumar, K. G. Brooks, and L. E. Cross, Rapid thermal annealing of sol-gel derived lead zirconate titanate thin films, J. Appl. Phys., vol. 71, pp. 4465-4469, 1992.
    • J. Appl. Phys.
    • Chen, J.1    Udayakumar, K.R.2    Brooks, K.G.3    Cross, L.E.4
  • 10
    • 0027816693 scopus 로고    scopus 로고
    • Combined simulation and measurement study of temperature uniformity in rapid thermal processing
    • vol. 303, pp. 231-236, 1993.
    • Y. Lin, R. Subrahmanyan, A. R. Sitaram, and M. Orlowski, Combined simulation and measurement study of temperature uniformity in rapid thermal processing, Mater. Res. Soc. Symp. Proc., vol. 303, pp. 231-236, 1993.
    • Mater. Res. Soc. Symp. Proc.
    • Lin, Y.1    Subrahmanyan, R.2    Sitaram, A.R.3    Orlowski, M.4
  • 12
    • 33748027270 scopus 로고    scopus 로고
    • Compositional and structural properties of sputtered PLZT thin films
    • vol. 243, pp. 417-421, 1992.
    • P. J. Borelli, P. H. Ballantine. and A. M. Kadin, Compositional and structural properties of sputtered PLZT thin films, Mater. Res. Soc. Symp. Proc., vol. 243, pp. 417-421, 1992.
    • Mater. Res. Soc. Symp. Proc.
    • Borelli, P.J.1    Ballantine, P.H.2    Kadin, A.M.3
  • 13
    • 0026257001 scopus 로고    scopus 로고
    • Deposition and characterization of thin ferroelectric lead lanthanum zirconate titanate (PLZT) films on sapphire for spatial light modulators applications
    • vol. 38, no. 6, pp. 585 589, 1991.
    • S. Krishnakumar, V. H. Ozguz, C. Fan, C. Cozzolino, S. C. Esener, and S. H. Lee, Deposition and characterization of thin ferroelectric lead lanthanum zirconate titanate (PLZT) films on sapphire for spatial light modulators applications. IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 38, no. 6, pp. 585 589, 1991.
    • IEEE Trans. Ultrason., Ferroelect., Freq. Contr.
    • Krishnakumar, S.1    Ozguz, V.H.2    Fan, C.3    Cozzolino, C.4    Esener, S.C.5    Lee, S.H.6
  • 14
    • 33747983643 scopus 로고    scopus 로고
    • Role of oxygen vacancies on the ferroelectric properties of PZT thin films
    • vol. 243, pp. 393-398, 1992.
    • C. K. Kwok and S. B. Desu, Role of oxygen vacancies on the ferroelectric properties of PZT thin films, Mater. Res. Soc. Symp. Proc., vol. 243, pp. 393-398, 1992.
    • Mater. Res. Soc. Symp. Proc.
    • Kwok, C.K.1    Desu, S.B.2
  • 15
    • 0028442010 scopus 로고    scopus 로고
    • Lead oxide coatings on sol-gel-derived lead lanthanum zirconium titanate thin layers for enhanced crystallization into the perovskite structure
    • vol. 77, no. 5, pp. 1242-1248, 1994.
    • T. Tani and D. A. Payne, Lead oxide coatings on sol-gel-derived lead lanthanum zirconium titanate thin layers for enhanced crystallization into the perovskite structure, J. Amer. Ceram. Soc., vol. 77, no. 5, pp. 1242-1248, 1994.
    • J. Amer. Ceram. Soc.
    • Tani, T.1    Payne, D.A.2
  • 17
    • 0026980711 scopus 로고    scopus 로고
    • An acetate process for bulk and thin film PL7T
    • 7th Int. Symp. Appl. Ferroelect., 1990, pp. 292-295.
    • G. H. Haertling, An acetate process for bulk and thin film PL7T, Proc. IKKE 7th Int. Symp. Appl. Ferroelect., 1990, pp. 292-295.
    • Proc. IKKE
    • Haertling, G.H.1
  • 18
    • 0030189445 scopus 로고    scopus 로고
    • The domain switching and structural characteristics of PLZT bulk ceramics and thin films chemically prepared from the same acetate precursor solutions
    • vol. 31, pp. 3409 3417, 1996.
    • D. E. Dausen and G. H. Haertling, The domain switching and structural characteristics of PLZT bulk ceramics and thin films chemically prepared from the same acetate precursor solutions, J. Mater. Sci., vol. 31, pp. 3409 3417, 1996.
    • J. Mater. Sci.
    • Dausen, D.E.1    Haertling, G.H.2
  • 19
    • 0028707194 scopus 로고    scopus 로고
    • Effects of applied stress on the dielectric properties of PLZT thin films
    • 9th Int. Symp. Appl. Ferroelect., 1994, pp. 784-787.
    • W. E. Paradise, F. Wang, and G. H. Haertling, Effects of applied stress on the dielectric properties of PLZT thin films, Proc. IEEE 9th Int. Symp. Appl. Ferroelect., 1994, pp. 784-787.
    • Proc. IEEE
    • Paradise, W.E.1    Wang, F.2    Haertling, G.H.3
  • 21
    • 84975662189 scopus 로고    scopus 로고
    • High precision retardation measurement using phase detection of Young's fringes
    • vol. 29, pp. 242-246, 1991.
    • S. Nakadate, High precision retardation measurement using phase detection of Young's fringes. Appl. Optics, vol. 29, pp. 242-246, 1991.
    • Appl. Optics
    • Nakadate, S.1
  • 22
    • 0028701724 scopus 로고    scopus 로고
    • Liquid delivery CVD of PLZT thick films for electrooptic applications
    • 9th Int. Symp. Appl. Ferroelect., 1994, pp. 687-690.
    • J. F. Roeder, S. M. Bilodeau, P. C. Van Buskirk, V. H. Ozguz, J. Ma. and S. H. Lee, Liquid delivery CVD of PLZT thick films for electrooptic applications, Proc. IEEE 9th Int. Symp. Appl. Ferroelect., 1994, pp. 687-690.
    • Proc. IEEE
    • Roeder, J.F.1    Bilodeau, S.M.2    Van Buskirk, P.C.3    Ozguz, V.H.4    Ma, J.5    Lee, S.H.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.