Preparation and properties of ferroelectric PLZT thin films by rf sputtering

Journal of Applied Physics

Volumn 48, Issue 3, 1977, Pages 951-953

  Ishida, M ^a   Matsunami, H ^a   Tanaka, T ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS - THIN FILMS;

CERAMIC MATERIALS;

EID: 0017469085     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.323714     Document Type: Article

References (8)