Liquid delivery CVD of PLZT thick films for electro-optic applications

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1994, Pages 687-690

  Roeder, J F ^a   Bilodeau, S M ^a   Van Buskirk, P C ^a   Ozguz, V H ^a   Ma, J ^a   Lee, S H ^a  

^a Advanced Technology Materials   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; COMPOSITION; ELECTRODES; ELECTROOPTICAL EFFECTS; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PEROVSKITE; SILICA; SUBSTRATES; VAPORIZATION;

BIREFRINGENT SHIFT; ELECTROOPTIC APPLICATIONS; FILM THICKNESS; INTERDIGITATED ELECTRODES; LEAD LANTHANUM ZIRCONATE TITANATE FILMS; LIQUID DELIVERY FLASH EVAPORATION; OPTICAL LOSS; SINGLE PHASE PEROVSKITE FILMS;

THICK FILMS;

EID: 0028701724     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)