Evolution and diffusion of hydrogen in CVD diamond films treated with hydrogen plasma

New Diamond and Frontier Carbon Technology

Volumn 6, Issue 5, 1996, Pages 293-299

  Itoh, Takashi ^a   Yagyu, Hiroyuki ^b   Mori, Yusuke ^b   Hatta, Akimitsu ^b   Ito, Toshimichi ^b   Hiraki, Akio ^b   Nitta, Shoji ^a  

^a GIFU UNIVERSITY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

CVD diamond films; Evolution and diffusion of hydrogen; Gas effusion spectra; Ion implantation damage and hydrogen plasma treatment

Indexed keywords

EID: 3142639399     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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