New insights into processes of hydrogen incorporation and hydrogen diffusion in hydrogenated amorphous silicon

Physica Status Solidi (A) Applied Research

Volumn 159, Issue 1, 1997, Pages 53-63

  Beyer, W ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CONCENTRATION (PROCESS); DIFFUSION IN SOLIDS; HYDROGEN; SECONDARY ION MASS SPECTROMETRY; SOLUBILITY;

BAND MODEL; HYDROGEN INCORPORATION;

AMORPHOUS SILICON;

EID: 0030647780     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396x(199701)159:1<53::aid-pssa53>3.0.co;2-i     Document Type: Article

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