AFM and light scattering measurements of optical thin films for applications in the UV spectral region

International Journal of Machine Tools and Manufacture

Volumn 38, Issue 5-6, 1998, Pages 733-739

  Jakobs, S ^a   Duparre A ^a   Truckenbrodt, H ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; LIGHT SCATTERING; MICROSTRUCTURE; OPTICAL FILMS; SUBSTRATES; THIN FILMS; ULTRAVIOLET RADIATION;

OPTICAL THIN FILMS;

SURFACE MEASUREMENT;

EID: 0032064646     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(97)00125-9     Document Type: Article

References (9)

1. A. Duparré, "Light Scattering of thin dielectric films," in Thin Films for Optical Coatings, CRC Press, 1995.
2. C. Ruppe, A. Duparré, Roughness analysis of optical films and substrates by atomic force microscopy, Thin Solid Films 288, 8-13, 1996.
3. J.M. Bennett, J. Jahanmir, et.al., Scanning force microscope as a tool for studying optical surfaces, Appl.Optics, 34(1), 1995.
4. H.H. Bauer, M. Heller, N. Kaiser, Optical Coatings for UV Photolithography Systems, SPIE 2776, 353-365 (1996).
5. N.A. Burnham, R.J. Colton, H.M. Pollock, Interpretation issues in force microscopy, J.Vac.Sci.Technol. A9 (4), 1991.
6. C. Deumié, R. Richier, P. Dumas, C. Amra, Multiscale roughness in optical multilayers: atomic force microscopy and light scattering, Applied Optics 35 (28), 5583-94, 1996.
7. S. Gliech, A. Duparré, Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths, SPIE 2775, 297-304, 1996.
8. H. Truckenbrodt, A. Duparré, U. Schuhmann, Roughness and Defect Characterization of Optical Surfaces by Light Scattering Measurements, SPIE 1781, 139 -151, 1992.
9. K.H. Guenther, Microstructure of vapor-deposited optical coatings, Applied Optics 23(21), 1984.