Optical coatings for UV photolithography systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2776, Issue , 1996, Pages 353-365

  Bauer, Harry H ^a   Heller, Matthias ^a   Kaiser, Norbert ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LENSES; LIGHT REFLECTION; PHOTOLITHOGRAPHY; QUALITY ASSURANCE; SURFACES; ULTRAVIOLET RADIATION;

CURVED SURFACES; ULTRAVIOLET LENSES; ULTRAVIOLET PHOTOLITOGRAPHY;

OPTICAL COATINGS;

EID: 0029725492     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.246823     Document Type: Conference Paper

References (2)