Properties of cubic boron nitride thin films deposited by a hybrid RF-PLD-technique

Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 388-392

  Klotzbucher T ^a   Mergens, M ^a   Wesner, D A ^b   Kreutz, E W ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

Compressive stress; Cubic boron nitride; Pulsed layer deposition; RF bias

Indexed keywords

ARGON; COMPOSITION EFFECTS; CRACK INITIATION; DELAMINATION; DEPOSITION; FILM GROWTH; ION BOMBARDMENT; NANOSTRUCTURED MATERIALS; PULSED LASER APPLICATIONS; STOICHIOMETRY; STRESSES; THIN FILMS;

PULSED LASER DEPOSITION;

CUBIC BORON NITRIDE;

EID: 0032021746     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00654-3     Document Type: Article

References (26)

1. A. Meller, Gmelin Handbook of Inorganic and Organometallic Chemistry, J. Faust (Ed.), Springer, Berlin, 1989.
2. F.P. Bundy, R.H. Wentorf, J. Chem. Phys. 38 (1963) 1144.
3. A. Chayahara, H. Yokoyama, T. Imura, Y. Osaka, Jap. J. Appl. Phys. 26 (1987) L1435.
4. T.A. Friedmann, P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, E.J. Klaus, D.R. Boehme, H.A. Johnsen, M.J. Mills, D.K. Ottesen, J.C. Barbour, J. Appl. Phys. 76 (1994) 3088.
5. W. Dworschak, K. Jung, H. Ehrhardt, Thin Solid Films 254 (1995) 65.
6. M. Kuhr, S. Reinke, W. Kulisch, Diamond Relat. Mater. 4 (1995) 375.
7. O. Tsuda, Y. Yamada, T. Fujii, T. Yoshida, J. Vac. Sci. Technol. A 13 (1995) 2843.
8. J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, F. Richter, Diamond Relat. Mater. 5 (1996) 1103.
9. C. Ronning, H. Hofsäss, Diamond Mater. 95 (1995) 359.
10. T. Klotzbücher, M. Mergens, D.A. Wesner, E.W. Kreutz, Diamond Relat. Mater. 6 (1997) 599.
11. G.F. Cardinale, P.B. Mirkarimi, K.F. McCarty, E.J. Klaus, D.L. Medlin, W.M. Clift, D.G. Howitt, Thin Solid Films 253 (1994) 130.
12. D.R. McKenzie, W.D. McFall, S. Reisch, B.W. James, I.S. Falconer, R.W. Boswell, H. Persing, A.J. Perry, A. Durandet, Surf. Coat. Technol. 78 (1996) 255.
13. P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, W.G. Wolfer, T.A. Friedmann, E.J. Klaus, G.F. Cardinale, D.G. Howitt, J. Mater. Res. 9 (1994) 2925.
14. T. Klotzbücher, E.W. Kreutz, presented at DIAMOND conference, Edinburgh, 1997.
15. T. Klotzbücher, M. Scherge, M. Mergens, D.A. Wesner, E.W. Kreutz, Surf. Coat. Technol. 98 (1998) 1072.
16. B. Chapman, Glow Discharge Processes, Wiley, New York, 1980.
17. T. Klotzbücher, W. Pfleging, D.A. Wesner, M. Mergens, E.W. Kreutz, Diamond Relat. Mater. 5 (1996) 525.
18. S. Reinke, M. Kuhr, W. Kulisch, R. Kassing, Diamond Relat. Mater. 4 (1995) 272.
19. M. Mertin, D. Offenberg, C.W. An, D.A. Wesner, E.W. Kreutz, Appl. Surf. Sci. 96 (1996) 842.
20. J.A. Sanjurjo, E. Lopez-Cruz, P. Vogel, M. Cardona, Phys. Rev. B 28 (1983) 4579.
21. D.R. McKenzie, W.D. McFall, W.G. Sainty, C.A. Davis, R.E. Collins, Diamond Relat. Mater. 2 (1993) 970.
22. G.P. Lamaze, R.G. Downing, L.B. Hackenberger, L.J. Pilione, R. Messier, Diamond Relat. Mater. 3 (1994) 728.
23. T. Werninghaus, M. Friedrich, J. Hahn, F. Richter, D.R.T. Zahn, Diamond Relat. Mater. 6 (1997) 612.
24. R.J. Nemanich, S.A. Solin, R.M. Martin, Phys. Rev. B 23 (1981) 6348.
25. P.J. Gielisse, S.S. Mitra, J.N. Plendl, R.D. Griffis, L.C. Mansur, R. Marshall, E.A. Pascoe, Phys. Rev. 155 (1967) 1039.
26. R. Geick, C.H. Perry, G. Rupprecht, Phys. Rev. 146 (1966) 543.