CAICISS studies of atomic-hydrogen-induced structural changes of the Sb terminated Si surfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 1102-1107

  Rui, Jeong Tak ^a   Kui, Koichiro ^a   Noda, Kenji ^a   Katayama, Mitsuhiro ^a   Oura, Kenjiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Atomic hydrogen adsorption; Hydrogen induced desorption; Ion scattering spectroscopy; Si(100) (2 1) Sb; Si(111) ( 3 3) Sb

Indexed keywords

ANTIMONY; DESORPTION; FILM GROWTH; GAS ADSORPTION; HYDROGEN; IONS; LOW ENERGY ELECTRON DIFFRACTION; SILICON; SPECTROSCOPY; SURFACE STRUCTURE;

COAXIAL IMPACT COLLISION ION SCATTERING SPECTROSCOPY (CAICISS);

NUCLEAR INSTRUMENTATION;

EID: 0032021234     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0168-583x(97)00799-4     Document Type: Article

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