Transmission electron microscope observation of grown-in defects detected by bright-field infrared-laser interferometer in Czochralski silicon crystals

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 2 SUPPL. B, 1998, Pages

  Ikematsu, Yoichi ^a   Mizutani, Toshiyuki ^a   Nakai, Katsuhiko ^a   Fujinami, Masanori ^a   Hasebe, Masami ^a   Ohashi, Wataru ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

Bright field infrared laser interferometer; Cavity; Czochralski silicon; Grown in defect; Transmission electron microscopy

Indexed keywords

CRYSTAL DEFECTS; INTERFEROMETRY; LASER APPLICATIONS; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY;

BRIGHT-FIELD INFRARED-LASER INTERFEROMETER;

CRYSTAL GROWTH FROM MELT;

EID: 0031997606     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.37.L196     Document Type: Article

References (12)

1. J. Ryuta, E. Morita, T. Tanaka and Y. Shimanuki: Jpn. J. Appl. Phys. 29 (1990) L1947.
2. H. Yamagishi, I. Fusegawa, N. Fujimaki and M. Katayama: Semicond. Sci. & Technol. 7 (1992) A135.
3. J-G. Park, H. Kirk, K-C. Cho, H-K. Lee and G. A. Rozgonyi: Semiconductor Silicon/1994, eds. H. R. Huff, W. Bergholz and K. Sumino (Electrochemical Society, Pennington, 1994) p. 370.
4. M. Itsumi, H. Akiya, T. Ueki, M. Tomita and M. Yamawaki: J. Appl. Phys. 78 (1995) 5984.
5. M. Itsumi, H. Akiya, T. Ueki, M. Tomita and M. Yamawaki: Jpn. J. Appl. Phys. 35 (1996) 812.
6. H. Deai, T. Iwasaki, Y. Ikematsu, K. Kawakami, H. Harada and A. Mastumura: Jpn. J. Appl. Phys. 35 (1996) L1476.
7. M. Kato, T. Yoshida, Y. Ikeda and Y. Kitagawara: Jpn. J. Appl. Phys. 35 (1996) 5597.
8. M. Nishimura, S. Yoshino, H. Motoura, S. Shimura, T. Mchedlidze and T. Hikono: J. Electrochem. Soc. 143 (1996) L243.
9. T. Ueki, M. Itsumi and T. Takeda: Appl. Phys. Lett. 70 (1997) 1248.
10. K. Nakai, M. Hasebe, T. Iwasaki and Y. Tsumori: Defects in Electronic Materials II, eds. J. Michel, T. Kennedy, K. Wada and K. Thonke (Materials Research Society, Pittsburgh, PA, 1997) p. 113.
11. J. S. Bacthelder and M. A. Taubenblatt: Appl. Phys. Lett. 55 (1989) 17.
12. P. B. Hirsch, A. Howie, R. B. Nicholson, D. W. Pashley and M. J. Whelan: Electron Microscopy of Thin Crystals (Butterworths, London, 1965) p. 159.