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Volumn 290-291, Issue , 1996, Pages 131-135

Heteroepitaxial nucleation of diamond by bias pretreatment in an electron cyclotron resonance microwave chemical vapor deposition system

(2) Marechal N a Yamashita, S a

a TOKYO GAS CO LTD (Japan)

Author keywords

Bias enhanced nucleation; Diamond; Electron cyclotron resonance; Epitaxy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DENSITY (SPECIFIC GRAVITY); ELECTRON CYCLOTRON RESONANCE; EPITAXIAL GROWTH; MICROWAVES; NUCLEATION; PARTICLES (PARTICULATE MATTER); PRESSURE EFFECTS; SILICON CARBIDE; SINGLE CRYSTALS; THERMAL EFFECTS;

BIAS ENHANCED NUCLEATION (BEN); HETEROEPITAXIAL NUCLEATION;

DIAMOND FILMS;

EID: 13544276609 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09200-0 Document Type: Article

Times cited : (3)

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