Reliable fabrication of sub-40 nm period gratings using a nanolithography system with interferometric dynamic focus control

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4115-4118

  Cumming, D R S ^a   Thomas, S ^a   Beaumont, S P ^a   Weaver, J M R ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346388941     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588602     Document Type: Article

References (13)

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