Analytical characterization of a planar magnetron radio frequency glow-discharge source

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 52, Issue 5, 1997, Pages 579-591

  Heintz, M J ^b   Broekaert, J A C ^a,b   Hieftje, G M ^b  

^a TU DORTMUND UNIVERSITY   (Germany)

^b INDIANA UNIVERSITY   (United States)

Author keywords

High resolution echelle; Planar magnetron; rf glow discharge

Indexed keywords

CHARACTERIZATION; ELECTRON EMISSION; ELECTRON ENERGY LEVELS; MAGNETRONS; MASS SPECTROMETRY; SPECTROMETERS; SPURIOUS SIGNAL NOISE; SPUTTERING;

ATOMIC EMISSION SPECTROMETRY; HIGH RESOLUTION ECHELLE SPECTROMETER; RF PLANAR MAGNETRON GLOW DISCHARGE;

GLOW DISCHARGES;

EID: 0031131355     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(96)01650-3     Document Type: Article

References (22)

1. A.J. van Roosmalen, J.A.G. Baggerman and S.J.H. Brader, Dry Etching for VLSI, Plenum, New York, 1992.
2. D.M. Manos and D.L. Flamm, eds., Plasma Etching, Academic Press, San Diego, 1989.
3. M.R. Winchester, C. Lazik and R.K. Marcus, Spectrochim. Acta, 46B (1991) 483.
4. C. Lazik and R.K. Marcus, Spectrochim. Acta Part B, 48 (1993) 1673.
5. D.C. Duckworth and R.K. Marcus, Anal. Chem., 61 (1989) 1879.
6. D.C. Duckworth and R.K. Marcus, J. Anal. At. Spectrom., 7 (1992) 711.
7. P.R. Banks and M.W. Blades, Spectrochim. Acta Part B, 44 (1989) 1117.
8. B.L. Bentz and W.W. Harrison, Anal. Chem., 54 (1982) 1644.
9. F. Leis, J.A.C. Broekaert and E.B.M. Steers, Spectrochim. Acta Part B, 46 (1991)243.
10. K. Trivedi, S. Tanguay, M. Matties and R. Sacks, Appl. Spectrosc., 41 (1987) 833.
11. L. McCaig, N. Sesi and R. Sacks, Appl. Spectrosc., 44 (1990) 1176.
12. K. Trivedi, S. Brewer, L. McCaig, N. Sesi and R. Sacks, Spectrochim. Acta Part B, 46 (1991) 229.
13. Z. Shi, T. Holbrook Woodrum, K. Dehghan, S. Brewer and R. Sacks, Appl. Spectrosc., 46 (1992) 749.
14. R. Sacks, S.W. Brewer, T. Woodrum, Z. Shi and K. Dehghan, The 1993 FACSS XX Conference, Detroit, MI, presentation number 391.
15. T. Mehdi, P.B. Legrand, J.P. Dauchot, M. Wautelet and M. Hecq, Spectrochim. Acta, 48B (1993) 1023.
16. M.J. Heintz and G.M. Hieftje, Spectrochim. Acta Part B, 50 (1995) 1109.
17. W. Grimm, Spectrochim. Acta, 23B (1968) 443.
18. G.M. Levy, A. Quaglia, R.E. Lazure and S.W. MeGeorge, Spectrochim. Acta, 42B (1987) 106.
19. M.J. Heintz, P.J. Galley and G.M. Hieftje, Spectrochim. Acta Part B, 49 (1994) 745.
20. K.R. Brushwyler and G.M. Hieftje, Appl. Spectrosc., 45 (1991) 682.
21. M.J. Heintz and G.M. Hieftje, Spectrochim. Acta B, 50 (1995) 1125.
22. T.R. Harville and R.K. Marcus, Anal. Chem., 45 (1993) 3636.