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Volumn 402-404, Issue , 1998, Pages 52-56

Stable Ge-H phase at 620 K on Si1-xGex/Si(001) surface: A high-resolution electron energy loss spectroscopy study

Author keywords

Chemical vapor Deposition; Chemisorption; Electron energy loss spectroscopy; Germanium; Hydrogen; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CHEMISORPTION; ELECTRON ENERGY LOSS SPECTROSCOPY; GAS ADSORPTION; HYDROGEN; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILANES;

EID: 0031627981     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(97)01018-2     Document Type: Article
Times cited : (8)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.