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Volumn 402-404, Issue , 1998, Pages 52-56
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Stable Ge-H phase at 620 K on Si1-xGex/Si(001) surface: A high-resolution electron energy loss spectroscopy study
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Author keywords
Chemical vapor Deposition; Chemisorption; Electron energy loss spectroscopy; Germanium; Hydrogen; Silicon
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CHEMISORPTION;
ELECTRON ENERGY LOSS SPECTROSCOPY;
GAS ADSORPTION;
HYDROGEN;
SEMICONDUCTING GERMANIUM;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SILANES;
HIGH RESOLUTION ELECTRON ENERGY LOSS SPECTROSCOPY;
HOT WIRE TECHNIQUE;
HETEROJUNCTIONS;
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EID: 0031627981
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(97)01018-2 Document Type: Article |
Times cited : (8)
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References (20)
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