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Diamond and Related Materials

Volumn 7, Issue 1, 1998, Pages 1-14

Applications of micron-scale passive diamond layers for the integrated circuits and microelectromechanical systems industries

(2) Touzelbaev, Maxat N a Goodson, Kenneth E a

a Stanford University (United States)

Author keywords

Diamond films; Integrated circuits; Microsensors; Thermal conductivity

Indexed keywords

APPLICATIONS; DIAMOND FILMS; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; THERMAL CONDUCTIVITY OF SOLIDS; VLSI CIRCUITS;

LAYERS;

INDUSTRIAL DIAMONDS;

EID: 0031624288 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(97)00199-4 Document Type: Article

Times cited : (26)

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