Impact of nucleation density on thermal resistance near diamond-substrate boundaries

Journal of Thermophysics and Heat Transfer

Volumn 11, Issue 4, 1997, Pages 506-512

  Touzelbaev, M N ^a,b   Goodson, K E ^a,b  

^a STANFORD UNIVERSITY   (United States)

^b Mechanical Engineering Department   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; DEPOSITION; DIAMOND FILMS; INCLUSIONS; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; NUCLEATION; SILICON; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS;

NUCLEATION DENSITY; PHONON TRANSPORT THEORY;

HEAT RESISTANCE;

EID: 0031251283     PISSN: 08878722     EISSN: 15336808     Source Type: Journal    
DOI: 10.2514/2.6291     Document Type: Article

References (22)

1. Ravi, K. V., and Landstrass, M. I., "Silicon on Insulator Technology Using CVD Diamond," 1st International Symposium on Diamond and Diamond-Like Films, edited by J. P. Dismukes et al., Electrochemical Society, Pennington, NJ, 1989, pp. 24-37.
2. Werner, M., Schlichting, V., and Obermeir, E., "Thermistor Based on Doped Polycrystalline Diamond Films," Diamond and Related Materials, Vol. 1, Nos. 5, 6, 1992, pp. 669-672.
3. Goodson, K. E., Kurabayashi, K., and Pease, R. F. W., "Improved Heat Sinking in Laser-Diode Arrays Using Microchannels in CVD Diamond," American Society of Mechanical Engineers National Heat Transfer Conf., Portland, OR, Aug. 1995.
4. Goodson, K. E., Käding, O. W., Rösler, M., and Zachai, R., "Experimental Investigation of Thermal Conduction Normal to Diamond-Silicon Boundaries," Journal of Applied Physics, Vol. 77, No. 4, 1995, pp. 1385-1392.
5. Madhusudana, C. V., and Fletcher, L. S., "Contact Heat Transfer - The Last Decade," AIAA Journal, Vol. 24, No. 3, 1986, pp. 510-523.
6. Yovanovich, M. M., "Recent Developments in Thermal Contact, Gap and Joint Conductance Theories and Experiment," 8th International Heat Transfer Conference, edited by C. L. Tien, V. P. Carey, and J. K. Ferrel, Vol. 1, Hemisphere, New York, 1986, pp. 35-45.
7. O'Callaghan, P. W., and Probert, S. D., "Thermal Resistance and Directional Index of Pressed Contacts Between Smooth Non-Wavy Surfaces," Journal of Mechanical Engineering Science, Vol. 16, No. 1, 1974, pp. 41-55.
8. Cooper, M. G., Mikic, B. B., and Yovanovich, M. M., "Thermal Contact Conductance," International Journal of Heat and Mass Transfer, Vol. 12, No. 3, 1969, pp. 279-300.
9. Majumdar, A., and Tien, C. L., "Fractal Network Model for Contact Conductance," Journal of Heat Transfer, Vol. 113, No. 3, 1991, pp. 516-525.
10. Little, W. A., "The Transport of Heat Between Dissimilar Solids at Low Temperatures," Canadian Journal of Physics, Vol. 37, No. 3, 1959, pp. 334-349.
11. Swartz, E. T., and Pohl, R. O., "Thermal Boundary Resistance," Reviews of Modern Physics, Vol. 61, No. 3, 1989, pp. 605-668.
12. Stoner, R. J., and Maris, H. J., "Kapitza Conductance and Heat Flow Between Solids at Temperatures from 50 to 300 K," Physical Review B: Solid State, Vol. 48, No. 22, 1993, pp. 16,373-16,387.
13. Morath, C. J., Maris, J. M., Cuomo, J. J., Pappas, D. L., Grill, A., Patel, V. V., Doyle, J. P., "Picosecond Optical Studies of Amorphous Diamond and Diamondlike Carbon: Thermal Conductivity and Longitudinal Sound Velocity," Journal of Applied Physics, Vol. 76, No. 5, 1994, pp. 2636-2640.
14. Graebner, J. E., "Thermal Conductivity of CVD Diamond: Techniques and Results," Diamond Films and Technology, Vol. 3, No. 2, 1993, pp. 77-130.
15. Stoner, B. R., Ma, G.-H. M., Wolter, S. D., and Glass, J. T., "Characterization of Bias-Enhanced Nucleation of Diamond on Silicon by in Vacuo Surface Analysis and Transmission Electron Microscopy," Physical Review B: Solid State, Vol. 45, No. 19, 1992, pp. 11,067-11,084.
16. Goodson, K. E., "Thermal Conduction in Nonhomogeneous CVD Diamond Layers in Electronic Microstructures," ASME/JSME Thermal Engineering Joint Conference, edited by L. S. Fletcher and T. Aihara, Vol. 4, 1995, pp. 183-192.
17. Freeman, J. J., and Anderson, A. C., "Thermal Conductivity of Amorphous Solids," Physical Review B: Solid State, Vol. 34, No. 8, 1986, pp. 5684-5690.
18. Zeller, R. C., and Pohl, R. O., "Thermal Conductivity and Specific Heat of Noncrystalline Solids," Physical Review B: Solid State, Vol. 4, No. 6, 1971, pp. 2029-2041.
19. Berman, R., Thermal Conduction in Solids, Oxford Univ. Press, Oxford, England, UK, 1976, p. 23.
20. Heatherington, A. V., Wort, C. J. H., and Southworth, P., "Crystalline Perfection of Chemical Vapor Deposited Diamond Films," Journal of Materials Research, Vol. 5, No. 8, 1990, pp. 1591-1594.
21. Goodson, K. E., Flik, M. I., Su, L. T., and Antoniadis, D. A., "Annealing-Temperature Dependence of the Thermal Conductivity of LPCVD Silicon-Dioxide Layers," IEEE Electron Device Letters, Vol. 14, No. 10, 1993, pp. 490-492.
22. Goodson, K. E., "Impact of CVD Diamond Layers on the Thermal Engineering of Electronic Systems," Annual Review of Heat Transfer, Vol. 6, 1995, pp. 323-353.