Real-space composition-depth profiling in polymeric samples to 3 nm resolution using the 2H(3He,1H)4He nuclear reaction

Acta Polymerica

Volumn 48, Issue 12, 1997, Pages 548-552

  Kerle, T ^a   Scheffold, F ^a   Losch, A ^a   Steiner, U ^a   Schatz, G ^b   Klein, J ^b  

^a WEIZMANN INSTITUTE OF SCIENCE   (Israel)

^b UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); PARTICLE BEAMS; PROTONS;

DEPTH PROFILING; NUCLEAR REACTION ANALYSIS (NRA);

POLYMERS;

EID: 0031371979     PISSN: 03237648     EISSN: None     Source Type: Journal    
DOI: 10.1002/actp.1997.010481204     Document Type: Article

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25. An absolute calibration of the depth scales thus generated was recently carried out by comparing the NRA-generated thickness of uniform films of deuterated polymers with values of the thickness obtained from ellipsometry and X-ray reflectometry on the same samples. For PS the agreement between the three methods was within a few percent.
26. F. Zink, T. Kerle, M. Tarabia, D. Davidov, J. Klein, to be published.
27. In the 4He detection mode too, reducing the angle a to 4° (as opposed to 15° used to date) and at the same time reducing the angle to the detector (to 10°-15°) would likely result in some improvement to the resolution relative to the earlier-used configuration (Fig. 1 a). The problem of greater scatter (for a given slit width) due to angular spread of the energies of the a-particles emitted in the forward direction would still remain, however.
28. Stable beam energies E>Ke < 700 keV are not at present feasible in our accelerator setup.
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30. This very slight reduction (< 1 nm) in the resolution is due to the extremely low grazing angle used. At the higher scattering angles used in earlier work, the effect of beam damage on the resolution are quite negligible, as demonstrated by the identity of profiles taken at different measuring times.
31. F. Zink, T. Kerle, J. Klein, Macromolecules, in press.