Characterization of cubic boron nitride films grown by mass separated ion beam deposition

Nuclear Inst. and Methods in Physics Research, B

Volumn 106, Issue 1-4, 1995, Pages 153-158

  Hofsass H ^a   Ronning, C ^a   Griesmeier, U ^a   Gross, M ^a   Reinke, S ^b   Kuhr, M ^b   Zweck, J ^c   Fischer, R ^c  

^a UNIVERSITY OF KONSTANZ   (Germany)

^b UNIVERSITY OF KASSEL   (Germany)

^c UNIVERSITY OF REGENSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038509307     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)00695-8     Document Type: Article

References (28)

1. Synthesis and Properties of boron nitride
2. Preparation of Cubic Boron Nitride Films by RF Sputtering
3. New method for fabrication of superconducting pipes in the Bi–Sr–Ca–Cu–O system
4. Effects of Ar ion beam bombardment on the formation of cubic BN in IBED
5. Mechanisms in ion induced c-BN growth
6. Cubic boron nitride films grown by low energy B+ and N+ ion beam deposition
7. Doping and growth of diamond-like carbon films by ion beam deposition
8. Materials Synthesis and Processing Using Ion Beams