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Volumn 16, Issue 11, 1997, Pages 1383-1389

Process variation effects on circuit performance: TCAD simulation of 256-mbit technology

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; FIELD EFFECT TRANSISTORS; MODELS; SECONDARY ION MASS SPECTROMETRY; TECHNOLOGY;

EID: 0031270978     PISSN: 02780070     EISSN: None     Source Type: Journal    
DOI: 10.1109/43.663828     Document Type: Article
Times cited : (17)

References (13)
  • 1
    • 33747488061 scopus 로고    scopus 로고
    • 4th Int. Symp. Process Physics and Modeling Semiconductor Technology, G. R. Srinivasan, C. S. Murthy, and S. T. Dunham, Eds., vol. 96-4. Pennington, NJ: Electrochemical Society, 1996, p. 228.
    • F. Morehead, R. Young, D. Chidambarrao, C. Murthy, P. Murley, and S. Fischer, "Modeling and calibration of TED," in Proc. 4th Int. Symp. Process Physics and Modeling Semiconductor Technology, G. R. Srinivasan, C. S. Murthy, and S. T. Dunham, Eds., vol. 96-4. Pennington, NJ: Electrochemical Society, 1996, p. 228.
    • "Modeling and Calibration of TED," in Proc.
    • Morehead, F.1    Young, R.2    Chidambarrao, D.3    Murthy, C.4    Murley, P.5    Fischer, S.6
  • 2
    • 33747495200 scopus 로고    scopus 로고
    • 4, Technology Modeling Associates, Inc., 1995.
    • User's Manual, TMA TSUPREM-4, Technology Modeling Associates, Inc., 1995.
    • User's Manual, TMA TSUPREM
  • 10
    • 0029543173 scopus 로고    scopus 로고
    • "A fully planarized 0.25 ftm CMOS technology for 256 Mbit DRAM and beyond," in VLSI Symp
    • 1995, p. 15.
    • G. Bronner et al., "A fully planarized 0.25 ftm CMOS technology for 256 Mbit DRAM and beyond," in VLSI Symp. Proc., 1995, p. 15.
    • Proc.
    • Bronner, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.