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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 5870-5873

Preparation and dielectric properties of the multilayer capacitor with (Ba, Sr)TiO3 thin layers by metalorganic chemical vapor deposition

(4) Takeshima, Yutaka a Shiratsuyu, Kosuke a Takagi, Hiroshi a Sakabe, Yukio a

a MURATA MANUFACTURING CO LTD (Japan)

Author keywords

Barium strontium titanate; Dielectric constant; Ferroelectric thin film; Metalorganic chemical vapor deposition; Multilayer capacitor; Perovskite

Indexed keywords

BARIUM COMPOUNDS; CAPACITANCE; CURRENT DENSITY; FERROELECTRIC MATERIALS; FILM PREPARATION; MAGNESIA; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY MEASUREMENT; PEROVSKITE; PLATINUM; SUBSTRATES; THIN FILM DEVICES;

BARIUM STRONTIUM TITANATE; MULTILAYER CERAMIC CAPACITORS (MLC);

CERAMIC CAPACITORS;

EID: 0031222062 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.5870 Document Type: Article

Times cited : (48)

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