Production of large diameter plasma by using multi-annular antenna for electron cyclotron resonance

Plasma Sources Science and Technology

Volumn 5, Issue 1, 1996, Pages 28-31

  Hatta, Akimitsu ^a,c   Ushigusa, Yoshihiro ^c   Yasaka, Yasuyoshi ^c   Itatani, Ryohei ^b,c  

^a OSAKA UNIVERSITY   (Japan)

^b NIIHAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; MAGNETIC FIELD EFFECTS; MICROWAVE ANTENNAS; MICROWAVE POWER TRANSMISSION; PERMANENT MAGNETS; PLASMAS;

ION SATURATION CURRENT; MICROWAVE POWER DISTRIBUTION; MULTIANNULAR ANTENNAS;

ELECTRON CYCLOTRON RESONANCE;

EID: 0030073660     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/1/003     Document Type: Article

References (7)

1. Suzuki K, Okadaira S, Sakudo N and Kanomata I 1977 Japan. J. Appl. Phys. 16 1979
2. Delaunay M 1990 Rev. Sci. Instrum. 61 267
3. Pichot M and Durandet A 1988 Rev. Sci. Instrum. 59 1072
4. Sato N, Iizuka S, Nakagawa Y and Tsukada T 1993 Appl. Phys. Lett. 62 469
5. Shida N, Inoue T, Kokai H, Sakamoto Y, Miyazawa W, Den S and Hayashi Y 1993 Japan. J. Appl. Phys. 32 L1635
6. Hatta A, Kubo M, Yasaka Y and Itatani R 1992 Japan. J. Appl. Phys. 31 1473
7. Hatta A, Yasaka Y and Itatani R 1992 Plasma Sources Sci. Technol. 1 13