Convergence properties of relaxation versus the surface-Newton generalized-conjugate residual algorithm for self-consistent electromechanical analysis of 3-D micro-electro-mechanical structures

1994 International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits, NUPAD 1994

Volumn , Issue , 1994, Pages 137-140

  Yie, H ^a   Cai, X ^a   White, J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; NEWTON-RAPHSON METHOD; NUMERICAL MODELS;

COMPUTATIONAL PROBLEM; CONVERGENCE PROPERTIES; ELECTROMECHANICAL ANALYSIS; ELECTROSTATIC ANALYSIS; MICRO-ELECTRO-MECHANICAL; SENSORS AND ACTUATORS; STANDARD FINITE ELEMENT; THREE-DIMENSIONAL STRUCTURE;

ELECTROSTATIC FORCE;

EID: 30244472694     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NUPAD.1994.343472     Document Type: Conference Paper

References (3)

1. Hibbit, Karlsson, and Sorensen, Inc., Providence, R.I.
2. K. Nabors and J. White, "Fastcap: A multipole-accelerated 3-D capacitance extraction program." IEEE Transactions on Compu ter-Aided Design, vol. 10 no. 10, November 1991, p. 1447-1459.
3. X. Cai, H. Yie, P. Osterberg, J. Gilbert, S. Senturia and J. White, "A Relaxation/Mul tipole-Accelerated Scheme for Self-Consis tent Electromechanical Analysis of Cornplex 3-D Microelectromechanical Structures, " Proc. Int. Conf. on Computer-Aided Design, Santa Clara, California, November 1993, pp. 270-274.