Relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures

Volumn , Issue , 1993, Pages 283-286

  Cai, X ^a   Yie, H ^a   Osterberg, P ^a   Gilbert, J ^a   Senturia, S ^a   White, J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; ITERATIVE METHODS; RELAXATION PROCESSES; SEMICONDUCTOR DEVICE STRUCTURES;

MULTIPOLE ACCELERATED ELECTROSTATIC ANALYSIS; SELF CONSISTENT ELECTROMECHANICAL ANALYSIS; THREE DIMENSIONAL MICROELECTROMECHANICAL STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0027797130     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)