New convergence scheme for self-consistent electromechanical analysis of iMEMS

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1995, Pages 605-608

  Bachtold, M ^a   Korvink, J G ^a   Funk, J ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; APPROXIMATION THEORY; BOUNDARY ELEMENT METHOD; COMPUTATIONAL COMPLEXITY; COMPUTER SIMULATION; CONVERGENCE OF NUMERICAL METHODS; ELECTROSTATICS;

ELECTROMECHANICAL ANALYSIS; INTEGRATED MICROELECTROMECHANICAL STRUCTURES; MICROACTUATORS; SURFACE DISPLACEMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0029518364     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)