Novel integrated thermal pressure gauge and read-out circuit by CMOS IC technology

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1994, Pages 131-134

  Paul, O ^a   Haberli, A ^a   Malcovati, P ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HEAT SINKS; HEAT TRANSFER; MICROMACHINING; PARTIAL PRESSURE SENSORS; PHOTOLITHOGRAPHY; PRESSURE EFFECTS; PRESSURE GAGES;

PIRANI GAUGES; SILICON BULK MICROMACHINING;

CMOS INTEGRATED CIRCUITS;

EID: 0028752011     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)