Working principle and performance of the dynamic micropump

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 221-226

  Gerlach, Torsten ^a   Wurmus, Helmut ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CALCULATIONS; CHANNEL FLOW; DYNAMICS; ETCHING; GEOMETRY; MATHEMATICAL MODELS; METHANOL; SEMICONDUCTING SILICON; VALVES (MECHANICAL);

ANISOTROPIC ETCHING; DYNAMIC MICROPUMP; DYNAMIC PASSIVE VALVE; PYRAMID TRUNC SHAPED DIFFUSERS; SILICON MICRODIFFUSERS;

PUMPS;

EID: 0029180969     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)