A low cost monolithic accelerometer; Product/technology update

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 1992-December, Issue , 1992, Pages 501-504

  Sherman, S J ^a   Tsang, W K ^a   Core, T A ^a   Payne, R S ^a   Quinn, D E ^a   Chau, K H L ^a   Farash, J A ^a   Baum, S K ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; ELECTRON DEVICES; SURFACE MICROMACHINING;

ACCELERATION SENSING; CIRCUIT ARCHITECTURES; HIGH VOLUMES; INTERFACE CIRCUITRY; LOW COSTS; MICRO-MACHINED; POLYSILICON SENSORS; WAFER FABRICATIONS;

ACCELEROMETERS;

EID: 84966723337     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1992.307410     Document Type: Conference Paper

References (1)

1. S. J. Shennan, W. K. Tsang, T. A. Core, D. E. Quinn, 1992 Symposium of VLSI Circuits, Seattle, W A