A micromachined silicon scan tip for an atomic force microscope

Technical Digest, 1990 Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1990, Pages 28-31

  Kong, L C ^a   Orr, B G ^a   Wise, K D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; PROBES; SEMICONDUCTING SILICON;

ATOMIC FORCE MICROSCOPES; MICROMACHINING; SCAN TIPS;

MICROSCOPES;

EID: 0025546760     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/solsen.1990.109813     Document Type: Conference Paper

References (7)