Detection and modelling of electrode topography effects on particle traps

Plasma Sources Science and Technology

Volumn 3, Issue 3, 1994, Pages 442-447

  Dalvie, M ^a   Surendra, M ^a   Selwyn, G S ^a   Guarnieri, C R ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006994876     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/3/3/030     Document Type: Article

References (14)

1. Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
2. Plasma particulate contamination control. II. Self-cleaning tool design