Ion drag and plasma-induced thermophoresis on particles in radiofrequency glow discharges

Journal of Physics D: Applied Physics

Volumn 27, Issue 12, 1994, Pages 2499-2507

  Perrin, Jèrôme ^a   Molinas Mata, P ^d   Belenguer, P ^c  

^a CNRS   (France)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^c UNIVERSITÉ PAUL SABATIER   (France)

^d UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ION DRAG FORCE; ION DRIFT VELOCITY; ION ORBITAL MOMENTUM TRANSFER; PLASMA INDUCED THERMOPHORESIS; THERMAL VELOCITY;

CHARGED PARTICLES; CHEMICAL VAPOR DEPOSITION; ELECTRODES; ELECTROSTATICS; IONS; ISOTHERMS; PLASMA SHEATHS; PLASMAS; THERMAL GRADIENTS;

GLOW DISCHARGES;

EID: 0028699869     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/27/12/009     Document Type: Article

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