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Volumn 79, Issue 19, 2001, Pages 3143-3145

Oxidation states in scanning-probe-induced Si3N4 to SiOcursive chi conversion studied by scanning photoemission microscopy

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Indexed keywords


EID: 0012752046     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1415415     Document Type: Article
Times cited : (35)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.