Effect of elastic constants on the stresses in stripes and substrates: A 2D FE calculation

Semiconductor Science and Technology

Volumn 13, Issue 8, 1998, Pages 864-870

  Jain, S C ^a   Pinardi, K ^a   Maes, H E ^a   Van Overstraeten, R ^a   Willander, M ^b  

^a IMEC   (Belgium)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012510616     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/13/8/006     Document Type: Article

References (18)

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