Linear and geometrically nonlinear behavior of metal/polysilicon plate microstructures subjected to temperature changes

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 207-213

  Dunn, Martin L ^a   Zhang, Yanhang ^a   Bright, Victor M ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; MEMS; MICROMACHINING; PLATE METAL; PLATES (STRUCTURAL COMPONENTS); THERMOELASTICITY;

DEFORMATION BEHAVIOR; GEOMETRICALLY NONLINEAR; INTERFEROMETRIC MICROSCOPE; NONLINEAR BEHAVIOURS; PLATE SIZE; PLATE STRUCTURE; SURFACE MICROMACHINING PROCESS; TEMPERATURE CHANGES; THERMOELASTIC RESPONSE; UNIFORM TEMPERATURE;

DEFORMATION;

EID: 0010934113     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1093     Document Type: Conference Paper

References (17)

1. Dano, M. L. and Hyer, M. W., 1998, "Thermally-Induced Deformation Behavior of Unsymmetric Laminates," Int. J. Solids Structures, Vol. 17, pp. 2101-2120.
2. Dunn, M. L., Zhang, Y., Roy, J. M., Labossiere, P. E. W., and Bright, V. M., 1999, "Nonlinear Deformation of Multilayer MEMS Structures," to appear in the Proceedings of the MEMS Symposium, ASME International Mechanical Engineering Congress and Exposition, Nashville, TN, November 14-19, 1999.
3. Finot, M. and Suresh, S., 1996, "Small and Large Deformation of Thick and Thin Film Multilayers: Effects of Layer Geometry, Plasticity and Compositional Gradients," J. Mech. Phys. Solids, Vol. 44, pp. 683-721.
4. Freund, L. B., 1993, "The Stress Distribution and Curvature of a General Compositionally Graded Semiconductor Layer," J. Crystal Growth, Vol. 132, pp. 341-344.
5. Freund, L. B., 1996, "Some Elementary Connections Between Curvature and Mismatch Strain in Compositionally Graded Thin Films," J. Mech. Phys. Solids, Vol. 44, pp. 723-736.
6. Freund, L. B., 1997, "The Mechanics of a Free-Standing Strained Film/Compliant Substrate System," In: Gerberich, W.W., Gao, H., Sundgren, J.E., Baker, S.P. (Eds.), Thin Films: Stresses and Mechanical Properties VI (Mater. Res. Soc. Proc. 436, Pittsburgh, PA), pp. 393-404.
7. Freund, L. B., 2000, "Substrate Curvature due to Thin Film Mismatch Strain in the Nonlinear Deformation Range," J. Mech. Phys. Solids, Vol. 48, pp. 1159-1174.
8. Hyer, M. W., 1981a, "Some Observations on the Cured Shape of Thin Unsymmetric Laminates," J. Compos. Mater., Vol. 15, pp. 175-194.
9. Hyer, M. W., 1981b, "Calculation of the Room-Temperature Shapes of Unsymmetric Laminates," J. Compos. Mater., Vol. 15, pp. 296-310.
10. Hyer, M. W., 1982, "The Room-Temperature Shape of Four-Layer Unsymmetric Cross-Ply Laminates," J. Compos. Mater., Vol. 16, pp. 318-340.
11. King, J. A., 1988, Materials Handbook for Hybrid Microelectronics, Teledyne Microelectronics, Los Angeles, California.
12. Masters, C. B. and Salamon, N. J., 1993, "Geometrically Nonlinear Stress-Deflection Relations for Thin Film/Substrate Systems," Int. J. Engrg. Sci., Vol. 31, pp. 915-925.
13. Masters, C. B. and Salamon, N. J., 1994, "Geometrically Nonlinear Stress-Deflection Relations for Thin Film/Substrate Systems With a Finite Element Comparison," J. Appl. Mech., Vol. 61, pp. 872-878.
14. Salamon, N. J. and Masters, C.B., 1995, "Bifurcation in Isotropic Thin Film/Substrate Plates," Int. J. Solids Structures, Vol. 32, pp. 473-481.
15. Sharpe W. N., Yuan B., and Edwards R. L., 1997, "A New Technique for Measuring the Mechanical Properties of Thin Films," Journal of Microelectromechanical Systems, Vol. 6, pp. 193-199.
16. Sharpe W. N., Turner, K. T., and Edwards R. L., 1999, "Tensile Testing of Polysilicon," Experimental Mechanics, Vol. 39, pp. 162-170.
17. Stoney, G. G, 1909, "The Tension of Metallic Films Deposited by Electrolysis," Proc. Roy. Soc. London, Vol. A82, pp. 172-175.