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Journal of Applied Physics

Volumn 87, Issue 6, 2000, Pages 2760-2764

Retarded C54 transformation and suppressed agglomeration by precipitates in TiSi2 films

(8) Suh, You Seok a Park, Dae Gyu a Jang, Se Aug a Lee, Sang Hyeob a Kim, Tae Kyun a Yeo, In Seok a Kim, Sam Dong a Kim, Chung Tae a

a Hynix Semiconductor Inc (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010726355 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.372252 Document Type: Article

Times cited : (6)

References (15)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.