Fabrication of stepped microoptical benches for fibre and free space applications

Microsystem Technologies

Volumn 2, Issue 2, 1996, Pages 40-45

  Muller A ^a   Gottert J ^a   Mohr, J ^a   Rogner, A ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b TU Chemnitz   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041552328     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02447748     Document Type: Article

References (13)

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2. Brenner K-H et al. (1993) Application of three-dimensional microoptical components formed by lithography, electroforming, and plastic molding. Appl. Opt. Vol. 32 6464
3. Heidrich H et al. (1995) Monolithisch integrierte HeterodynEmpfänger. Proc. Diskussionstagung Integrierte Optik. Jena, May 18-19, 1995
4. Becker EW et al. (1986) Fabrication of microstructures with high aspect ratio and great structural heights by synchrotron radiation lithography, galvanoforming and plastic moulding (LIGA process). Microelectr. Eng. Vol. 4 35
5. Göttert J, Mohr J (1991) Characterisation of Micro-Optical Components Fabricated by Deep-Etch X-Ray Lithography. SPIE Proc. Vol. 1506/Proc. Micro-Optics II 170
6. Müller-Fiedler R (1995) Robert Bosch GmbH, personal communication
7. Schaller T et al. (1995) Realization of Microstructured Mould Inserts using Mechanical Microengineering Methods, to be published in Micro System Technologies.
8. Rogner A; Pannhoff H (1994) Mass fabrication of passive polymer multimode and singlemode waveguide devices. Proc. OFC 1994, San Jose, February 20-25, p. 279
9. Breitmeier U; Häusler G (1995) Optical Profile Measurement of Micro-Structures with High Aspect Ratio, to be published in Micro System Technologies
10. Müller A et al. (1993) LIGA microstructures on top of micromachined silicon wafers used to fabricate a microoptical switch. J. Micromech. Microeng. Vol. 3 158
11. Müller A et al. (1995) Hybrid Optical Transceiver Module with a Microoptical LIGA-Bench accepted for the 21st European Conference on Optical Communication (ECOC '95), Bruxelles, 17-21 Sept. 1995
12. Gengenbach U; Göttert J (1994) Requirements and first results of an assembly and handling apparatus for automated fabrication of microsystems. Proc. Seminar on Handling an Assembly of Microparts, Vienna, 14th Nov. 1994
13. Mohr J et al. (1993) Micro optical switching by electrostatic linear actuators with large displacements. Proc. Transducers '93, Yokohama