Structural analysis of hydrogenated carbon films obtained by reactive direct current magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 194-196

  Fujimaki, Shigehiko ^a   Matsumoto, Hiroshi ^a   Kokaku, Yuichi ^a   Kitoh, Makoto ^a   Tsumita, Norikazu ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030557510     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579917     Document Type: Article

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