Using optical metrology to monitor low-k dielectric thin films

MICRO

Volumn 18, Issue 5, 2000, Pages 31-38

  Yang, Feng ^a,b,c   McGahan, William A ^d   Mohler, Carol E ^e   Booms, Lisa M ^f  

^a NANOMETRICS INC   (United States)

^b Neocera Inc   (United States)

^c UNIVERSITY AT BUFFALO   (United States)

^d JA Woollam Inc   (United States)

^e DOW CHEMICAL COMPANY   (United States)

^f SAGINAW VALLEY STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009599723     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. NH Hendricks, "The Status of Low-k Materials Development," in Proceedings of the Sixth International Dielectrics for ULSI Multilevel Interconnection Conference (Tampa, FL: IMIC, 2000), 17-26.
2. W Volksen et al., "Characterization of Porous Organosilicates for On-Chip Applications," in Proceedings of the Sixth International Dielectrics for ULSI Multilevel Interconnection Conference (Tampa, FL: IMIC, 2000), 67-76.
3. PH Townsend et al., "SiLK Polymer Coating with Low Dielectric Constant and High Thermal Stability for ULSI Interlayer Dielectric," in Proceedings of the Materials Research Society 476 (Warrendale, PA: Materials Research Society, 1997), 9-17.
4. S Allada, "Low K Adhesion Issues in Cu/Low K Integration," in Proceedings of the Second International Interconnect Technology Conference (1999), 161.
5. F Yang et al., "Investigation of Thermal Curing of an Organic Low-k Spin-On Dielectric by Variable-Angle Spectroscopic Ellipsometry" (paper presented at the 46th International Symposium of the American Vacuum Society, Seattle, October 25-28, 1999).
6. JA Woollam and PG Snyder, "Fundamentals and Applications of Variable Angle Spectroscopic Ellipsometry," Materials Science and Engineering B5 (1990): 279-283.
7. F Yang, M Tabet, and WA McGahan, "Characterizing Optical Properties of Red, Green, and Blue Color Filters for Automated Film Thickness Measurement," in Proceedings of SPIE 3332 (Bellingham, WA: International Society for Optical Engineering, 1998), 403-410.
8. WA McGahan et al., "Optical Characterization of TiN Thin Films," in Proceedings of the ASMC 96 (Piscataway, NJ: IEEE, 1996), 359-363.
9. WA McGahan, "Optical Characterization of Polycrystalline Silicon Thin Films," in Proceedings of SPIE 2725 (Bellingham, WA: International Society for Optical Engineering, 1996), 450-459.
10. VJ Coates, U.S. Pat. 5,045,704, 1991.