Characterizing optical properties of red, green, and blue color filters for automated film thickness measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3332, Issue , 1998, Pages 403-410

  Yang, Feng ^a   Tabet, Milad ^a   McGahan, William A ^a  

^a NANOMETRICS INC   (United States)

Author keywords

Color filter; Spectroscopic reflectometry; Thin film; Variable angle spectroscopic ellipsometry

Indexed keywords

COLOR FILMS; ELLIPSOMETRY; OPTICAL COATINGS; OPTICAL CORRELATION; OPTICAL FILMS; REFLECTOMETERS; REFRACTIVE INDEX; REGRESSION ANALYSIS; SPECTROSCOPIC ANALYSIS; THIN FILMS;

COLOR FILTERS;

OPTICAL FILTERS;

EID: 0032401535     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308749     Document Type: Conference Paper

References (5)