Ion absorbing stencil mask coatings for ion beam lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2214-2217

  Wasson, J R ^a   Torres, J L ^a   Rampersad, H R ^a   Wolfe, J C ^a   Ruchhoeft, P ^a   Herbordt, Martin ^a   Loschner H ^b  

^a UNIVERSITY OF HOUSTON   (United States)

^b Ionen Mikrofabrikations Systeme GmbH   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009346066     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589616     Document Type: Article

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