Stencil mask temperature measurement and control during ion irradiation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3900-3902

  Riordon, James ^a   Didenko, Lidia ^a   Melngailis, John ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037754904     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588690     Document Type: Article

References (3)

1. A. Birman, B. Levush, J. Melngailis, H. Loschner, and G. Stengl, J. Vac. Sci. Technol. B 13, 2584 (1995).
2. H. Glavish, H. Loschner, G. Stengl, and A. Chalupka, U.S. Patent No. 4,916,322.
3. P. E. Mauger, A. R. Shimkunas, J. C. Wolfe, S. Sen, H. Loschner, and G. Stengl, J. Vac. Sci. Technol. B 10, 2819 (1992).