Surface effects during ion beam processing of materials

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 3-13

  Averback, R S ^a   Ghaly, Mai ^a   Zhu, H ^a   Caturla, M J ^a   Marques, L ^a   Diaz, T ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; COMPUTER SIMULATION; COPPER ALLOYS; CRYSTAL ATOMIC STRUCTURE; ION BEAMS; ION IMPLANTATION; METALLIC GLASS; MICROSTRUCTURE; MODIFICATION; MOLECULAR DYNAMICS; PLATINUM; SPUTTERING;

ION BEAM PROCESSING; ION SPUTTERING; MICROSTRUCTURAL CHANGES; SURFACE EFFECTS; SURFACE TOPOGRAPHY; THERMAL SPIKES;

SURFACES;

EID: 0029710401     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)