Monte Carlo study of vacancy-mediated impurity diffusion in silicon

Physical Review B - Condensed Matter and Materials Physics

Volumn 61, Issue 4, 2000, Pages R2397-R2400

  Bunea, Marius M ^a   Dunham, Scott T ^b  

^a Boston University   (United States)

^b Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006771004     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.61.R2397     Document Type: Article

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