Spectroscopic ellipsometry for polymer thin films

Solid State Technology

Volumn 41, Issue 10, 1998, Pages 101-110

  Hilfiker, James N ^a,c   Synowicki, Ron A ^a,c   Bungay, Corey L ^a,c   Carpio, Ron ^b  

^a J A WOOLLAM CO INC   (United States)

^b SEMATECH   (United States)

^c UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005819748     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (14)

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2. G.E. Jellison Jr., F.A, Modine, Appl. Phys. Lett. 69, 371, 1996; Erratum, Appl. Phys. Lett. 69, 2137, 1996.
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4. T.E. Tiwald, D.W. Thompson, J.A. Woollam, "Optical Determination of Shallow Carrier Profiles Using Fourier Transform Infrared Ellipsometry," J. Vac. Sci. Technol. B, 16 (1), 312, 1998.
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9. R. A. Carpio, A. Stephen, J. Eisele, "A Study of the Modifications of Polymeric ARC Films by UV Irradiation," SPIE, 1998 (to be published).
10. S. Kishimura, et al., SPIE Vol. 3049, p. 944.
11. R.R. Dammel, J. Sagan, R.A. Synowicki, "Dependence of Optical Constants of AZ BarLi Bottom Coating on Bake Conditions," SPIE Proc., Vol. 3049, p. 963, 1997.
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13. N. Aoi, Jpn. J. Appl. Phys., Vol. 36, pp. 1355-1359, Part 1, No. 3B, 1997.
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