Measurement and error evaluation of electrical parameters at plasma relevant frequencies and impedances

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 595-606

  Garvin, C ^a   Grimard, D ^a   Grizzle, J ^a   Gilchrist, Brian E ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032395989     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581098     Document Type: Article

References (22)

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