-
1
-
-
0015374797
-
-
Y. Ohraura, Y. Zohta, and M. Kanazawa, Solid State Commun. 11, 263 (1972); Phys. Status Solidi A 15, 93 (1973).
-
(1972)
Solid State Commun.
, vol.11
, pp. 263
-
-
Ohraura, Y.1
Zohta, Y.2
Kanazawa, M.3
-
2
-
-
0015374797
-
-
Y. Ohraura, Y. Zohta, and M. Kanazawa, Solid State Commun. 11, 263 (1972); Phys. Status Solidi A 15, 93 (1973).
-
(1973)
Phys. Status Solidi A
, vol.15
, pp. 93
-
-
-
5
-
-
0021291823
-
-
Ion Implantation and Ion Beam Processing of Materials, edited by G. Hubber, O. W. Holland, C. R. Clayton, and C. W. White, Materials Research Society, Pittsburgh, PA
-
S. R. Wilson, W. M. Paulson, W. F. Krolikowski, D. Fathy, J. Gresstt, A. H. Hamdi, and F. D. McDanniel, in Ion Implantation and Ion Beam Processing of Materials, edited by G. Hubber, O. W. Holland, C. R. Clayton, and C. W. White, Mater. Res. Soc. Symp. Proc. No. 27 (Materials Research Society, Pittsburgh, PA, 1984), p. 287.
-
(1984)
Mater. Res. Soc. Symp. Proc.
, vol.27
, pp. 287
-
-
Wilson, S.R.1
Paulson, W.M.2
Krolikowski, W.F.3
Fathy, D.4
Gresstt, J.5
Hamdi, A.H.6
McDanniel, F.D.7
-
7
-
-
0020737881
-
-
Yu. V. Gorelkinskii and N. N. Nevinnyi, Radiat. Eff. 71, 1 (1983); Nucl. Instrum. Methods 209/210, 677 (1983); Physica B 170, 155 (1991).
-
(1983)
Nucl. Instrum. Methods
, vol.209-210
, pp. 677
-
-
-
8
-
-
0020737881
-
-
Yu. V. Gorelkinskii and N. N. Nevinnyi, Radiat. Eff. 71, 1 (1983); Nucl. Instrum. Methods 209/210, 677 (1983); Physica B 170, 155 (1991).
-
(1991)
Physica B
, vol.170
, pp. 155
-
-
-
9
-
-
11644286313
-
-
edited by K. Sumino Elsevier, Amsterdam
-
S. Tokmoldin, B. Mukashev, M. Tamendarov, and S. Chasnikova, in Defect Control in Semiconductors, edited by K. Sumino (Elsevier, Amsterdam, 1990), p. 425.
-
(1990)
Defect Control in Semiconductors
, pp. 425
-
-
Tokmoldin, S.1
Mukashev, B.2
Tamendarov, M.3
Chasnikova, S.4
-
11
-
-
0001478334
-
-
J. Hartung and J. Weber, Phys. Rev. B 48, 14161 (1993); J. Appl. Phys. 77, 118 (1995).
-
(1995)
J. Appl. Phys.
, vol.77
, pp. 118
-
-
-
12
-
-
0001410880
-
-
Yu. V. Martynov, T. Gregorkiewicz, and C. A. J. Ammerlaan, Phys. Rev. Lett. 74, 2030 (1995); Mater. Sci. Forum 196-201, 849 (1995).
-
(1995)
Phys. Rev. Lett.
, vol.74
, pp. 2030
-
-
Martynov, Yu.V.1
Gregorkiewicz, T.2
Ammerlaan, C.A.J.3
-
13
-
-
0029534197
-
-
Yu. V. Martynov, T. Gregorkiewicz, and C. A. J. Ammerlaan, Phys. Rev. Lett. 74, 2030 (1995); Mater. Sci. Forum 196-201, 849 (1995).
-
(1995)
Mater. Sci. Forum
, vol.196-201
, pp. 849
-
-
-
15
-
-
0000593295
-
-
R. C. Newman, J. H. Tucker, N. G. Semaltianos, E. C. Lightowlers, T. Gregorkiewicz, I. S. Zevenbergen, and C. A. J. Ammerlaan, Phys. Rev. B 54, R6803 (1996).
-
(1996)
Phys. Rev. B
, vol.54
-
-
Newman, R.C.1
Tucker, J.H.2
Semaltianos, N.G.3
Lightowlers, E.C.4
Gregorkiewicz, T.5
Zevenbergen, I.S.6
Ammerlaan, C.A.J.7
-
16
-
-
3743148289
-
-
R. C. Newman, M. J. Ashwin, R. E. Pritchard, J. H. Tucker, E. C. Lightowlers, T. Gregorkiewicz, I. S. Zevenbergen, C. A. J. Ammerlaan, R. Falster, and M. J. Binns, Mater. Sci. Forum 258-263, 379 (1997).
-
(1997)
Mater. Sci. Forum
, vol.258-263
, pp. 379
-
-
Newman, R.C.1
Ashwin, M.J.2
Pritchard, R.E.3
Tucker, J.H.4
Lightowlers, E.C.5
Gregorkiewicz, T.6
Zevenbergen, I.S.7
Ammerlaan, C.A.J.8
Falster, R.9
Binns, M.J.10
-
17
-
-
3743120158
-
-
F. P. Korshunov, V. P, Markevich, I. F. Medvedeva, and L. I. Murin, Dokl. Akad. Nauk 38, 35 (1994).
-
(1994)
Dokl. Akad. Nauk
, vol.38
, pp. 35
-
-
Korshunov, F.P.1
Markevich, V.P.2
Medvedeva, I.F.3
Murin, L.I.4
-
18
-
-
0000233664
-
-
V. P. Markevich, M. Suezawa, K. Sumino, and L. I. Murin, J. Appl. Phys. 76, 7347 (1994).
-
(1994)
J. Appl. Phys.
, vol.76
, pp. 7347
-
-
Markevich, V.P.1
Suezawa, M.2
Sumino, K.3
Murin, L.I.4
-
19
-
-
18144438707
-
-
H. Hatakeyama, M. Suezawa, V. P. Markevich, and K. Sumino, Mater. Sci. Forum 196-201, 939 (1995).
-
(1995)
Mater. Sci. Forum
, vol.196-201
, pp. 939
-
-
Hatakeyama, H.1
Suezawa, M.2
Markevich, V.P.3
Sumino, K.4
-
20
-
-
18344410978
-
-
V. P. Markevich, I. F. Medvedeva, L. I. Murin, T. Sekiguchi, M. Suezawa, and K. Sumino, Mater. Sci. Forum 196-201, 945 (1995).
-
(1995)
Mater. Sci. Forum
, vol.196-201
, pp. 945
-
-
Markevich, V.P.1
Medvedeva, I.F.2
Murin, L.I.3
Sekiguchi, T.4
Suezawa, M.5
Sumino, K.6
-
22
-
-
0040795999
-
-
V. P. Markevich and L. I. Murin, Fiz. Tekh. Poluprovodn. 30, 1186 (1996) [Semiconductors 30, 626 (1996)].
-
(1996)
Semiconductors
, vol.30
, pp. 626
-
-
-
26
-
-
0642371777
-
-
Oxygen in Silicon, edited by F. Shimura, edited by R. K. Willardson, A. C. Beer, and E. R. Weber Academic, San Diego, Chap. 6
-
B. Pajot, in Oxygen in Silicon, edited by F. Shimura, Vol. 42 of Semiconductors and Semimetals, edited by R. K. Willardson, A. C. Beer, and E. R. Weber (Academic, San Diego, 1994), Chap. 6.
-
(1994)
Semiconductors and Semimetals
, vol.42
-
-
Pajot, B.1
-
27
-
-
5644291587
-
-
I. A. Veloarisoa, D. M. Kozuch, M. Stavola, R. E. Peale, G. D. Watkins, S. J. Pearton, C. R. Abernathy, and W. S. Hobson, Mater. Sci. Forum 83-87, 111 (1992).
-
(1992)
Mater. Sci. Forum
, vol.83-87
, pp. 111
-
-
Veloarisoa, I.A.1
Kozuch, D.M.2
Stavola, M.3
Peale, R.E.4
Watkins, G.D.5
Pearton, S.J.6
Abernathy, C.R.7
Hobson, W.S.8
-
29
-
-
5844298308
-
-
Defects in Electronic Materials, edited by M. Stavola, S. J. Pearton, and G. Davies, Materials Research Society, Pittsburgh
-
J. M. Trombetta and G. D. Watkins, in Defects in Electronic Materials, edited by M. Stavola, S. J. Pearton, and G. Davies, Mater. Res. Soc. Symp. Proc. No. 104 (Materials Research Society, Pittsburgh, 1988), p. 93.
-
(1988)
Mater. Res. Soc. Symp. Proc.
, vol.104
, pp. 93
-
-
Trombetta, J.M.1
Watkins, G.D.2
-
30
-
-
0004876068
-
-
Early Stages of Oxygen Precipitation in Silicon, edited by R. Jones Kluwer, Dordrecht, NATO ASI Series, 3
-
V. P. Markevich, I. F. Medvedeva, and L. I. Murin, in Early Stages of Oxygen Precipitation in Silicon, edited by R. Jones (Kluwer, Dordrecht, 1996), NATO ASI Series, 3. High Technology, Vol. 17, p. 103.
-
(1996)
High Technology
, vol.17
, pp. 103
-
-
Markevich, V.P.1
Medvedeva, I.F.2
Murin, L.I.3
-
34
-
-
0028581442
-
-
B. Bech Nielsen, J. D. Holbech, R. Jones, P. Sitch, and S. Oberg, Mater. Sci. Forum 143-147, 845 (1994).
-
(1994)
Mater. Sci. Forum
, vol.143-147
, pp. 845
-
-
Bech Nielsen, B.1
Holbech, J.D.2
Jones, R.3
Sitch, P.4
Oberg, S.5
-
35
-
-
0011922057
-
-
K. Murakami, N. Fukata, S. Sasaki, K. Ishioka, M. Kitajima, S. Fujimura, J. Kikuchi, and H. Haneda, Phys. Rev. Lett. 77, 3161 (1996).
-
(1996)
Phys. Rev. Lett.
, vol.77
, pp. 3161
-
-
Murakami, K.1
Fukata, N.2
Sasaki, S.3
Ishioka, K.4
Kitajima, M.5
Fujimura, S.6
Kikuchi, J.7
Haneda, H.8
-
37
-
-
0001332088
-
-
R. E. Pritchard, M. J. Ashwin, R. C. Newman, J. H. Tucker, E. C. Lightowlers, M. J. Binns, R. Falster, and S. A. McQuaid, Phys. Rev. B 56, 13118 (1997).
-
(1997)
Phys. Rev. B
, vol.56
, pp. 13118
-
-
Pritchard, R.E.1
Ashwin, M.J.2
Newman, R.C.3
Tucker, J.H.4
Lightowlers, E.C.5
Binns, M.J.6
Falster, R.7
McQuaid, S.A.8
-
39
-
-
0001649399
-
-
L. C. Kimerling, M. T. Asom, J. L. Benton, P. J. Drevinsky, and C. E. Caefer, Mater. Sci. Forum 38-41, 141 (1989).
-
(1989)
Mater. Sci. Forum
, vol.38-41
, pp. 141
-
-
Kimerling, L.C.1
Asom, M.T.2
Benton, J.L.3
Drevinsky, P.J.4
Caefer, C.E.5
-
40
-
-
0001188875
-
-
B. Bech Nielsen, K. Tanderup, M. Budde, K. Bonde Nielsen, J. L. Lindstrom, R. Jones, S. Oberg, B. Hourahine, and P. Briddon, Mater. Sci. Forum 258-263, 391 (1997).
-
(1997)
Mater. Sci. Forum
, vol.258-263
, pp. 391
-
-
Bech Nielsen, B.1
Tanderup, K.2
Budde, M.3
Bonde Nielsen, K.4
Lindstrom, J.L.5
Jones, R.6
Oberg, S.7
Hourahine, B.8
Briddon, P.9
-
41
-
-
0031388786
-
-
B. Hourahine, R. Jones, S. Oberg, and P. R. Briddon, Mater. Sci. Forum 258-263, 277 (1997).
-
(1997)
Mater. Sci. Forum
, vol.258-263
, pp. 277
-
-
Hourahine, B.1
Jones, R.2
Oberg, S.3
Briddon, P.R.4
-
42
-
-
0008532315
-
-
Early Stages of Oxygen Precipitation in Silicon, edited by R. Jones Kluwer, Dordrecht, NATO ASI Series, 3
-
P. Deak, in Early Stages of Oxygen Precipitation in Silicon, edited by R. Jones (Kluwer, Dordrecht, 1996), NATO ASI Series, 3. High Technology, Vol. 17, p. 163.
-
(1996)
High Technology
, vol.17
, pp. 163
-
-
Deak, P.1
-
44
-
-
0000969926
-
-
C. P. Ewels, R. Jones, S. Oberg, J. Miro, and P. Deak, Phys. Rev. Lett. 77, 865 (1996).
-
(1996)
Phys. Rev. Lett.
, vol.77
, pp. 865
-
-
Ewels, C.P.1
Jones, R.2
Oberg, S.3
Miro, J.4
Deak, P.5
-
45
-
-
0002138397
-
-
L. F. Makarenko, V. P. Markevich, and L. I. Murin, Fiz. Tekh. Poluprovodn. 19, 1935 (1985) [ Semiconductors 19, 1192 (1996)].
-
(1985)
Fiz. Tekh. Poluprovodn.
, vol.19
, pp. 1935
-
-
Makarenko, L.F.1
Markevich, V.P.2
Murin, L.I.3
-
46
-
-
11644271829
-
-
L. F. Makarenko, V. P. Markevich, and L. I. Murin, Fiz. Tekh. Poluprovodn. 19, 1935 (1985) [ Semiconductors 19, 1192 (1996)].
-
(1996)
Semiconductors
, vol.19
, pp. 1192
-
-
-
47
-
-
0022662912
-
-
Ya. I. Latushko, L. F. Makarenko, V. P. Markevich, and L. I. Murin, Phys. Status Solidi A 93, K181 (1986).
-
(1986)
Phys. Status Solidi A
, vol.93
-
-
Latushko, Ya.I.1
Makarenko, L.F.2
Markevich, V.P.3
Murin, L.I.4
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