|
|
|
Volumn 452, Issue , 1997, Pages 3-17
|
|
Recent progress in microcrystalline semiconductor thin films
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTALLIZATION;
GROWTH (MATERIALS);
HYDROGENATION;
MAGNETRON SPUTTERING;
MICROSCOPIC EXAMINATION;
NANOSTRUCTURED MATERIALS;
SEMICONDUCTOR DEVICE STRUCTURES;
THIN FILM TRANSISTORS;
HYDROGEN PLASMA;
LASER NUCLEATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
|
|
EID: 0030653536
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (22)
|
|
References (77)
|
