Stability of the dielectric properties of PECVD deposited carbon-doped SiOF films

Thin Solid Films

Volumn 337, Issue 1-2, 1999, Pages 67-70

  Lubguban Jr , Jorge ^a   Saitoh, Atsusi ^a   Kurata, Yoshihiro ^a   Inokuma, Takao ^a   Hasegawa, Seiichi ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

Dielectric properties; SiO2:F:C; Vibrational properties; Water resistivity

Indexed keywords

EID: 0002950602     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0040-6090(98)01186-9     Document Type: Article

References (13)

1. K. Kim, J. Song, D. Kwon, J.S. Lee, Appl. Phys. Lett. 72 (1998) 1247.
2. H. Miyajima, R. Katsumata, Y. Nakasaki, Y. Nishigawa, N. Hayasaka, Jpn. J. Appl. Phys. 35 (1996) 6217.
3. S. Hasegawa, T. Tsukaoka, T. Inokuma, Y. Kurata, J. Non-Cryst. Solids (1998) in press.
4. S. Hasegawa, A. Saitoh, J. Lubguban, T. Inokuma, Y. Kurata, Jpn J. Appl. Phys. 37 (1998) 4904.
5. Y. Nakasaki, H. Miyajima, R. Katsumata, N. Hayasaka, Jpn. J. Appl. Phys. 36 (1997) 5259.
6. D.S. Kim, Y.H. Lee, N. Park, Appl. Phys. Lett. 69 (1996) 2776.
7. A. Nara, H. Itoh, Jpn. J. Appl. Phys. 36 (1997) 1477.
8. K. Ishii, A. Takami, H. Ohki, J. Appl. Phys. 81 (1997) 1470.
9. S. Hasegawa, Y. Amano, T. Inokuma, Y. Kurata, J. Appl. Phys. 72 (1992) 5676.
10. F.L. Galeener, Phys. Rev. B 19 (1979) 4292.
11. R.T. Sanderson, Chemical Bonds and Bonding Energy, 2nd ed. Academic Press, New York, 1976) p. 77.
12. G. Lucovsky, M.J. Manitini, J. Vac. Sci. Technol. B 5 (1987) 1470.
13. M.H. Brodsky, M. Cardona, J.J. Cuomo, Phys. Rev. B 16 (1977) 3556.